Extensis®, made with a plasma-resistant compound, provides extended service life for PECVD (plasma enhanced chemical vapor deposition) process tools as well as slit valve doors while reducing equipment downtime. The Extensis seal's unique flexibility offers a limitless number of custom designs and sizes to meet the demanding and competitive needs of FPD (Flat Panel Display) and solar production.
The seal's unique Dovetail® cross-section design facilitates installation and optimizes performance by reducing seal roll. The formed rectangular seal is custom designed to match the slit valve door, reducing stress in the corners and increasing the seal's service life and cost efficiency.
*Patent Pending
MATERIALS
Elastomers
|
LITERATURE
|