Chemraz® 547 is a perfluoroelastomer specifically developed by Greene, Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in fluorine plasma processes resulting in less downtime and higher wafer processing yields. This novel formulation delivers elemental purity, without fillers, to reduce contamination risk. Chemraz 547 is recommended for both dynamic and static, dry wafer processing applications such as deposition (PECVD, HDPCVD, etc.) and remote plasma cleans. Chemraz 547 remains stable at service temperatures up to 300°C (572°F).
Collaborative innovation from GREENE, TWEED & CO., INC., and DAIKIN INDUSTRIES, LTD.