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Fusion™ 706

High Purity Fluoroelastomer

SEALING SOLUTIONS

Fusion™ 706 is a low durometer, high purity, fluoroelastomer, developed for a wide range of semiconductor processing sealing applications. Special engineering applications requiring low sealing force materials, such as bonded slit valve gates, are well suited for Fusion™ 706. Recommended for use in a range of plasma equipment applications, from etch and plasma enhanced CVD to plasma ashing applications, Fusion™ 706 is ideal for sealing devices that must accommodate tolerance stackup conditions. Fusion™ 706 offers very low metallic ion levels and good resistance to today’s advanced process chemistries. Contact our Semiconductor engineering and sales experts for specific application recommendations.

Features & Benefits

  • Good plasma resistance
  • Soft material for low sealing forces and tolerance stackups
  • High purity, low metallic ion content
  • Low cost

APPLICATIONS

  • Bonded slit valve gates
  • Chamber seals
  • Door seals
  • Filter seals
  • Gas inlet seals
  • Lid seals
  • Window seals
  • Valve seals

RECOMMENDED PROCESS APPLICATIONS

  • Deposition
  • Dry plasma etch
  • Dry ashing
  • Oxidation
  • Diffusion
  • Metalization
  • Wet Benches
  • Wet/Chemical applications
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*Note: Unless otherwise indicated, all tests are performed on AS 568A (-214) O-rings.


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