Fusion™ 706 is a low durometer, high purity, fluoroelastomer, developed for a wide range of semiconductor processing sealing applications. Special engineering applications requiring low sealing force materials, such as bonded slit valve gates, are well suited for Fusion™ 706. Recommended for use in a range of plasma equipment applications, from etch and plasma enhanced CVD to plasma ashing applications, Fusion™ 706 is ideal for sealing devices that must accommodate tolerance stackup conditions. Fusion™ 706 offers very low metallic ion levels and good resistance to today’s advanced process chemistries. Contact our Semiconductor engineering and sales experts for specific application recommendations.
*Note: Unless otherwise indicated, all tests are performed on AS 568A (-214) O-rings.