SEALING SOLUTIONS

Chemraz® 513 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. This material offers excellent performance history in static plasma, photolithography and diffusion processes where temperatures do not exceed 210ºC (410°F) and high-sealing loads are not used. The hardness of this material allows for some hardware finish inconsistency.

Features & Benefits

  • Good plasma resistance
  • Good physical properties
  • Minimal contamination
  • Excellent performance history as “universal product”

APPLICATIONS

  • Door seals
  • Slit valves
  • Window seals
  • Isolator valve seals
  • Lid seals
  • Gas inlet seals
  • KF fitting seals
chemraz513-image1

RECOMMENDED PROCESS APPLICATIONS

  • Metalization (CVD, PVD, sputtering, evaporation)
  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
  • Dry ashing
  • Ion implant
  • Implant anneal
  • Rapid thermal processing (RTP)s


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