SEALING SOLUTIONS

Chemraz® 543 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. It offers excellent performance in etching, metalization and diffusion processes where temperatures do not exceed 210ºC (410°F). Additionally, the hardness of this material allows for some hardware finish inconsistency.

Features & Benefits

  • Good plasma resistance
  • Good physical properties
  • Minimal contamination
  • Excellent performance as a “universal product”

APPLICATIONS

  • Door seals
  • Slit valves
  • Window seals
  • Isolator valve seals
  • Lid seals
  • Gas inlet seals
  • KF fitting seals
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RECOMMENDED PROCESS APPLICATIONS

  • Metalization (CVD, PVD, sputtering, evaporation)
  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
  • Dry ashing
  • Ion implant
  • Implant anneal
  • Rapid thermal processing (RTP)


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