SEALING SOLUTIONS

Chemraz® 571 is recommended for a wide variety of semiconductor equipment wet processing applications where stringent seal reliability and contamination control are required. This seal material offers excellent performance in long-term static sealing applications in acid, solvent and ultrapure H2O. Chemraz® 571 is excellent for high-sealing load designs.

Features & Benefits

  • Very low contaminants
  • Extended performance and added reliability
  • Good physical properties
  • Excellent performance history

APPLICATIONS

  • Valve seals
  • Fitting and union seals
  • Gaskets
  • Regulator seals
  • Filter seals
  • Dispensing seals
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RECOMMENDED PROCESS APPLICATIONS

  • Wet etch (acid, base)
  • Wet stripping (solvents)
  • Wet cleaning (UPDI)
  • Wet metal plating
  • Chemical Mechanical Planarization (CMP)


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