SEALING SOLUTIONS

Chemraz® 629 perfluoroelastomer (FFKM) is specifically developed by Greene, Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wafer processing yields. Chemraz® 629 is developed from an advanced polymer utilizing fluoro-polymer nano-composite technology particles. Recommended for both static and dynamic dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.) with challenging gland designs and reduced sealing loads. Chemraz® 629 remains stable at service temperatures up to 260ºC (500°F).

Features & Benefits

  • Exceptional plasma resistance in oxygen and fluorine environments
  • Minimal particulation and surface degradation
  • High purity, very low metallic ion content
  • High elasticity allows conformance to hardware and easier seal installation

APPLICATIONS

  • Endpoint windows
  • Bell jar seals
  • Valve seals
  • KF fitting seals
  • Window seals
  • Isolator valve seals
  • Lid seals
  • Gas inlet seals
  • Slit valve seals
  • Chamber seals
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RECOMMENDED PROCESS APPLICATIONS

  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
  • Dry ashing
  • Oxidation (LPCVD)/Diffusion
  • Metalization (CVD, PVD, sputtering, evaporation)


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