SEALING SOLUTIONS

Chemraz® 653 is a black perfluoroelastomer (FFKM) specifically formulated to meet the extreme demands of diffusion, LPCVD and thin dry processing applications. It exhibits superior compression set resistance and is recommended for static and dynamic high temperature applications up to 324ºC (615°F).

Features & Benefits

  • Carbon-loaded material
  • For use in systems where contamination is less critical
  • Suitable for higher temperature applications
  • Superior compression set
  • Excellent plasma resistance

APPLICATIONS

  • Quartz rod seals
  • Bell jar seals
  • High-temperature valve seals
  • KF fitting seals
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RECOMMENDED PROCESS APPLICATIONS

  • Oxidation (LPCVD)
  • Diffusion
  • Rapid thermal processing (RTP)
  • Metalization (CVD, PVD, sputtering, evaporation)
  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
  • Dry ashing
  • Implant anneal


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