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Fusion™ 742

Versatile High Performance Fluoroelastomer

SEALING SOLUTIONS

Fusion™ 742 performs well in aggressive chemicals and where ultrapure materials are not required. Recommended for conventional wet and dry system applications, Fusion™ 742 has a good field performance history in both dynamic and static applications. The mid-range durometer of this material allows the seal to conform to a wide range of hardware features.

FEATURES & BENEFITS

  • Outstanding physical properties
  • Conforms well to hardware features
  • Good performance history in aggressive chemicals

APPLICATIONS

  • Bonded slit valve doors
  • Chamber seals
  • Door seals
  • Window seals
  • Lid seals
  • Gas inlet seals
  • KF fitting seals
  • Valve seals
  • Gaskets
  • Fitting and union seals

RECOMMENDED PROCESS APPLICATIONS

  • Metalization (CVD, PVD, sputtering, evaporation)
  • Ion implant
  • Oxidation (LPCVD)/Diffusion
  • Deposition (CVD, PECVD, RPCVD, HDCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Dry ashing
  • Wet etch (acid, base)
  • Wet metal plating
  • Implant anneal
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