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FPD Blue™ 707

Minimal Contamination in FPD Processing

FLUOROELASTOMER

Specifically developed for flat panel display CVD and dry plasma etch equipment where seal reliability and minimal contamination are essential, FPD Blue™ 707 fluoroelastomer provides excellent chemical compatibility and withstands a variety of aggressive chemicals. Available in an infinite range of geometries and cross sections, this material offers the diversity required for a variety of dynamic or static dry processing applications. FPD Blue 707 remains stable at service temperatures up to 220°C (428°F) and is ideally suited for large lid seals and bonded slit valve door seals.

FEATURES & BENEFITS

  • Withstands a variety of aggressive chemicals for long in-life service
  • Minimal contamination due to seal degradation or metallic ion content
  • Extends in-use seal life between preventative maintenance cycles over conventional carbon-black-filled elastomers
  • Excellent physical properties
  • Unlimited design flexibility

APPLICATIONS

  • Endpoint windows
  • Valve seals
  • KF fitting seals
  • Window seals
  • Lid seals
  • Gas inlet seals
  • Slit valve seals
  • Chamber seals

RECOMMENDED PROCESS APPLICATIONS

  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
* Note: Unless otherwise indicated, all tests are performed on (-214) O-rings.

* Note: Unless otherwise indicated, all tests are performed on (-214) O-rings.



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