SEALING SOLUTIONS

Chemraz® 592, a versatile perfluoroelastomer (FFKM) developed with a proprietary filler system, is very resistant to plasma attack. This compound’s durometer allows for some hardware finish inconsistency and higher sealing loads. It’s well suited for critical seals in static and dynamic dry applications where reliability and purity are equally essential. Chemraz® 592 is recommended for applications with service temperatures up to 240ºC (464°F).

Features & Benefits

  • Excellent physical properties
  • Inert mineral filler system provides excellent resistance to plasma attack
  • Good static and dynamic performance

APPLICATIONS

  • Slit valve seals
  • Lid seals
  • Endpoint windows
  • Valve seals
  • Window seals
  • Isolator valve seals
  • Gas inlet seals
  • Bell jar seals
  • KF fitting seals
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RECOMMENDED PROCESS APPLICATIONS

  • Dry Ashing (O2)
  • Oxidation (LPCVD)/Diffusion
  • Metalization (CVD, PVD, sputtering, evaporation)
  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
  • Implant anneal
  • Rapid thermal processing (RTP)


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