SEALING SOLUTIONS

Chemraz® 655 is Greene, Tweed’s high-temperature off-white perfluoroelastomer (FFKM). Specifically developed for wafer processes with operating temperatures up to 315ºC (600°F), Chemraz® 655 provides excellent chemical resistance with minimal particle generation. Available in a wide range of geometries and cross sections, this material offers the diversity required for a variety of dynamic or static dry processing applications.

Features & Benefits

  • Service temperatures up to 315ºC (600°F)
  • Excellent balance of physical properties
  • Minimal contamination
  • Withstands a variety of aggressive chemicals
  • Unlimited design flexibility

APPLICATIONS

  • Door seals
  • Slit valves
  • Window seals
  • Isolator valve seals
  • Lid seals
  • Gas Inlet seals
  • KF fitting seals
  • Chamber seals
  • Valve seals
  • Endpoint windows
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RECOMMENDED PROCESS APPLICATIONS

  • Rapid thermal processing (RTP)
  • Oxidation (LPCVD)/Diffusion
  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
  • Dry ashing
  • Implant anneal


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