SEALING SOLUTIONS

Chemraz® 656 is a low durometer perfluoroelastomer primarily designed for Bonded Slit Valve gates and special engineered applications such as low sealing forces/tolerance stackups where softer materials aid in the total seal solution. Developed from an advanced polymer utilizing fluoropolymer nano-composite technology particles, Chemraz® 656 has very low metallic ion levels and offers unsurpassed resistance to today’s advanced process chemistries. Chemraz® 656 is recommended for use in CVD, Etch and diffusion equipment applications.

Features & Benefits

  • Excellent plasma resistance
  • Soft material for low sealing forces and tolerance stackups
  • High purity, very low metallic ion content

APPLICATIONS

  • Bonded slit valve gates
  • Chamber seals
  • Window seals
  • Gas inlet seals
  • Lid seals
chemraz656-image1

RECOMMENDED PROCESS APPLICATIONS

  • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD)
  • Dry plasma etch
  • Remote plasma cleans
  • Dry ashing
  • Oxidation (LPCVD)
  • Diffusion
  • Metalization (CVD, PVD, sputtering, evaporation)


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