Fusion® F07

For The Industry’s Most Demanding SubFab Applications

Semiconductor SubFab operators know downtime and maintenance are costly – that’s why Fusion® F07 is designed to meet and exceed the aggressive demands of SubFab environments.

Currently available as individual O-rings or assemblies for vacuum system lines, this new FKM elastomer is built to handle oxygen- and fluorine-based chemistries common in etch and CVD processes. Fusion® F07 retains its form and function at temperatures up to 355°F (180°C) and boasts a minimum expected lifetime of six months in extreme conditions. When equipment failure is not an option, choose Greene Tweed.