Semiconductor Sealing and Material Solutions

Engineered to withstand the harshest environments, Greene Tweed solutions deliver unmatched reliability, reduced downtime, and enhanced efficiency for leading semiconductor fabs, foundries, and OEMs.

O-Ring Analysis Tool

Over 35 years of designing innovative solutions for the semiconductor industry.

Reduces downtime and enhances yields with advanced materials and design.

INFOGRAPHIC

ETCH SOLUTIONS

DEPOSITION SOLUTIONS

ADVANCED PACKAGING

ETCH SOLUTIONS

Reliability for Extreme Plasma Environments

Greene Tweed provides optimized sealing solutions for oxygen plasma and aggressive plasma chemistries and a broad range of temperature and vacuum conditions, ensuring consistent performance in critical dry and wet etch applications. Our designs reduce particulation and improve wafer yields in demanding environments.

Custom materials for resistance to a broad range of aggressive chemistries
Unique dry etch sealing solutions as well as wet/clean processing component solutions
Reduces particulation and improves wafer yields

DEPOSITION SOLUTIONS

Durability for a Range of Temperatures and Chemistries

Greene Tweed offers sealing solutions for many types of deposition from ALD to PECVD to electroplating and many more. From o-rings, to bonded slit valves, to advanced edge exclusion seals for electroplating, our solutions withstand extreme temperatures and chemical exposure, delivering exceptional durability and performance.

A broad range of designs and materials for many types of deposition
Ensures durability under extreme temperatures and chemistries

ADVANCED PACKAGING

Precision for Emerging Packaging Technologies

Greene Tweed develops custom sealing solutions for many processes used in advanced packaging, including ECD. Our designs improve yields and reduce contamination during wafer-level packaging, ensuring smooth operations for cutting-edge technologies.

Custom seals for advanced packaging processes
Improves yield and reduces contamination in wafer packaging

CHEMRAZ® ELASTOMERS

ONX® COMPOSITES

FUSION® ELASTOMERS

CHEMRAZ® ELASTOMERS

Reliable Sealing for Harsh Environments

Chemraz® FFKM elastomers offer exceptional chemical resistance, ensuring reliable performance in extreme plasma and thermal conditions. Designed for demanding applications, they deliver unmatched durability and longevity.

Withstand aggressive chemicals and extreme temperatures
Prolonged seal life in high-pressure environments
Engineered for superior performance and reliability

ONX® COMPOSITES

High-Strength Materials for Precision Performance

ONX® composites are designed to enhance electrostatic chuck components with advanced durability and precision. Perfect for critical applications, they deliver consistent performance and reliability.

Withstands high loads and extreme conditions
Lightweight and engineered for optimal efficiency
Long-lasting materials for superior operational stability

FUSION® ELASTOMERS

Custom Solutions for Tough Sealing Challenges

Our Fusion (TM) FKM solutions are tailored to tackle the most demanding applications with a wide range of material choices. Designed to meet the specific needs of your fab, they provide reliable, long-term solutions.

Resist extreme temperatures and harsh chemicals
Customizable designs to fit unique application needs
Deliver consistent, reliable sealing performance

ETCH SOLUTIONS

Reliability for Extreme Plasma Environments

Custom materials for resistance to a broad range of aggressive chemistries
Unique dry etch sealing solutions as well as wet/clean processing component solutions
Reduces particulation and improves wafer yields

DEPOSITION SOLUTIONS

Durability for a Range of Temperatures and Chemistries

A broad range of designs and materials for many types of deposition
Ensures durability under extreme temperatures and chemistries

ADVANCED PACKAGING

Precision for Emerging Packaging Technologies

Custom seals for advanced packaging processes
Improves yield and reduces contamination in wafer packaging

CHEMRAZ® ELASTOMERS

Reliable Sealing for Harsh Environments

Withstand aggressive chemicals and extreme temperatures
Prolonged seal life in high-pressure environments
Engineered for superior performance and reliability

LEARN ABOUT CHEMRAZ®

ONX® COMPOSITES

High-Strength Materials for Precision Performance

ONX® composites are designed to enhance electrostatic chuck components with advanced durability and precision. Perfect for critical applications, they deliver consistent performance and reliability.

Withstands high loads and extreme conditions
Lightweight and engineered for optimal efficiency
Long-lasting materials for superior operational stability

DISCOVER ONX® BENEFITS

FUSION® ELASTOMERS

Custom Solutions for Tough Sealing Challenges

Resist extreme temperatures and harsh chemicals
Customizable designs to fit unique application needs
Deliver consistent, reliable sealing performance

FUSION® SOLUTIONS

Additional Resources:

Semiconductor Playbook:

Comprehensive Guide to Sealing Solutions and Materials

Compound Semiconductor:

Seals: The compelling case for Greene Tweed

Blog:

All Your Semiconductor Sealing Questions, Answered

Webinar:

Solving the Sealing Challenges of APC (Pendulum Valves)

Case Study:

Best Practices for Protecting & Extending the Life of Electrostatic Chucks in Plasma Applications

Semiconductor Playbook: Comprehensive Guide to Sealing Solutions and Materials

Compound Semiconductor: Seals: The compelling case for Greene Tweed

Blog: All Your Semiconductor Sealing Questions, Answered

Webinar: Solving the Sealing Challenges of APC (Pendulum Valves)

Case Study: Best Practices for Protecting & Extending the Life of Electrostatic Chucks in Plasma Applications

Solutions You Can Count On, Expertise You Can Trust

For over 35 years, Greene Tweed has partnered with leading semiconductor fabs and OEMs to provide innovative solutions that tackle the industry’s toughest challenges. From advanced materials to precision designs, our products drive performance and efficiency.

Semiconductor
Articles, News & More:

Three Tips to Extend your Seal’s Life in Semiconductor Applications

Here’s Why You Might Want To Try Metal Spring Energized Seals in Semiconductor Applications